Australian technology innovator, BluGlass Limited (ASX:BLG) has today announced that it will collaborate with global semiconductor equipment leader, AIXTRON SE (FSE:AIXA), to evaluate BluGlass’ unique remote plasma chemical vapour deposition (RPCVD) technology.
BluGlass has selected the AIX 2800G4-HT system for the scaling of RPCVD to mass production capacities. AIXTRON’s Planetary Reactor® delivers class leading semiconductor film uniformity due to its proprietary dual axis of wafer rotation during deposition. RPCVD technology enables low temperature deposition of III-V nitrides which could potentially improve the performance of devices. The first integration of RPCVD onto the AIX 2800G4-HT will be conducted at BluGlass’ Silverwater facility in Sydney, Australia.
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